MLD Database

Molecular Layer Deposition Community Database

Enter information for each unique film. A single paper may have multiple entries (e.g. different chemistries or growth temperatures).

Precursor 1:

Precursor name *

Bubbler temperature * ⓘ

°C Room temp?

Dose time (ms) ⓘ

ms

Purge time (s) * ⓘ

s

Precursor 2:

Precursor name *

Bubbler temperature * ⓘ

°C Room temp?

Dose time (ms) ⓘ

ms

Purge time (s) * ⓘ

s

Precursor 3? ⓘ

Process Conditions

Film material *

Specify film material

Substrate *

Specify substrate

Growth temperature *

°C Room temp?

Growth per cycle ⓘ

Inert gas flow ⓘ

sccm

Material Properties of MLD film

Refractive index

Elastic modulus

Hardness

Density

g/cm³

Stability in air ⓘ

% thickness reduction per day

Other Comments: ⓘ